Products used in this application:
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QB3 High Flow (30 SCFM) Electronic Pressure Controller
$708.00 Select options This product has multiple variants. The options may be chosen on the product page -
SPV Compact High Resolution Pressure Valve
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Laser Chamber Pressure Control
When controlling gases to a laser chamber, mass flow control is (generally) employed. However, in this sketch we are demonstrating laser chamber pressure control to achieve a similar result. A 3-station SPV (manifold mount) pressure control assembly is controlling 3 different gasses to a fixed (and known) orifice. By varying the pressure to the fixed orifices, flow can be varied with predictable and repeatable results.
While not as effective and accurate as employing a mass flow controller for each individual gas, this concept is much more affordable and can produce excellent results. The simple concept behind it: If you know the exact size of an orifice, the density of the gas and the pressure, you can predict the flow through the orifice.
The QB3 in this application is also assisting the mixture by controlling a precise vacuum level in the laser chamber.