Laser Charging Chamber Flow Control

Laser Charging Chamber Flow Control

This sketch shows a laser charging chamber flow control application that required a 3-gas mixture that could be adjusted on the fly. Three F-Series closed-loop flow controllers were used – one for each gas controlled. The mixture could be changed by adjusting the command signal to the corresponding flow controller. Since this is a closed-loop control scheme, the signal from the flow monitors could be used for data acquisition. This signal is available on pin 5 of the FQPV2’s main electrical connector.

A QB3 is also being used in this application to control vacuum in the charging chamber. The vacuum level is a critical component that requires repeatable control to help maintain the proper level of each gas in the charging chamber.